Proposed Phase-Modulator Check System for Phase-Modulated Excimer-Laser Annealing

摘要

The fluctuation of the light intensity distribution on a sample surface has an adverse effect in lateral Si crystallization methods, such as phase-modulated excimer-laser annealing (PMELA). Consequently, the origins of various fluctuations must be examined precisely and suppressed satisfactorily and independently. In particular, the phase modulator, which mainly determines the microscopic light intensity distribution, must be checked carefully. We have developed a stand-alone visible-light check system for phase modulators, by taking different wavelength effects into account, and have confirmed the usefulness of the system.