Hydrogen-Sensing Response of Carbon-Nanotube Thin-Film Sensor with Pd Comb-Like Electrodes

摘要

Hydrogen gas sensors based on single-walled carbon nanotube (SWCNT) films were fabricated with Pd comb-like electrodes. The SWCNT films were deposited by Mo/Co catalyst-assisted chemical vapor deposition using alcohol. The film included a high-density network of SWCNTs. The SWCNT film sensor showed a large conductance change and a fast response (20 s) upon exposure to 1% H_2 gas in air at room temperature, while the conductance change was negligible for devices using Au electrodes.