Diode-type Gas Sensors Fabricated with a Titania Film on a Ti Plate and Pd-Pt Electrodes –Effects of Polymer Coating on the Hydrogen-sensing Properties–

摘要

H2 responses of a diode-type gas sensor fabricated with a TiO2 film prepared by anodization of a Ti plate and Pd-Pt electrodes (Pd-Pt/TiO2) and the effects of polymer coating on the Pd-Pt/TiO 2 sensor were investigated in this study. The H2 response of the Pd-Pt/TiO2 sensor in dry N2 was larger than that in dry air at 250°C, but the addition of moisture into the atmosphere reduced O2 concentration dependence of H2 response. The responses decreased drastically at lower temperature (50°C), but the responses in N2 were larger than those in air under both dry and wet conditions. The coating of polymer on the Pd-Pt/TiO2 sensor increased the H 2 responses in wet air and N2 and reduced O2 concentration dependence of H2 responses.