Direct Patterning of Silicon Nitride Thin Film by Projection Photoablation for Fabricating Thin-Film Transistor Liquid Crystal Displays

Chao-Nan Chen; Gwo-Mei Wu; Wu-Shiung Feng; Hao-Wen Jean

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Direct Patterning of Silicon Nitride Thin Film by Projection Photoablation for Fabricating Thin-Film Transistor Liquid Crystal Displays

机译：通过投影光烧蚀直接图案化氮化硅薄膜以制造薄膜晶体管液晶显示器

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The direct patterning of silicon nitride (SiN_x) thin films on glass substrates using a KrF 248 nm excimer laser has been investigated. The direct laser patterning process offers a cost-effective alternative to wet- and dry-etch lithographies for the fabr

机译：研究了使用KrF 248 nm准分子激光器在玻璃基板上直接图案化氮化硅（SiN_x）薄膜的方法。直接激光图案化工艺提供了一种经济，有效的替代，用于湿法和干法蚀刻平版印刷

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《Japanese journal of applied physics》 |2008年第4issue1期|2152-2154|共3页
作者
Chao-Nan Chen; Gwo-Mei Wu; Wu-Shiung Feng; Hao-Wen Jean;
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正文语种 eng
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KrF excimer laser; silicon nitride; direct patterning; TFT-LCD; projection;

机译：KrF准分子激光器;氮化硅直接图案化;TFT-LCD;投影;

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专利

1. Poly-Si Thin-Film Transistors Robust against Hot-Carrier Stress and Application to Liquid Crystal Displays Fabricated by a 450 ℃ Process [J] . Takeo Shiba, Mutsuko Hatano, Mieko Matsumura, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2003,第0期

机译：多晶硅薄膜晶体管对热载流子应力具有鲁棒性，并应用于450℃工艺制造的液晶显示器
2. A Dry-Patterned Cu(Mg) Alloy Film as a Gate Electrode in a Thin-Film Transistor Liquid Crystal Display [J] . H.J.Yang, Y.K.Ko, J.Jang, Journal of Electronic Materials . 2004,第7期

机译：薄膜晶体管液晶显示器中作为栅极电极的干式Cu（Mg）合金膜
3. Laser Direct Patterning of Organic Dielectric Passivation Layer for Fabricating Amorphous Silicon Thin-Film Transistors [J] . Chao-Nan Chen, Kuo-Hui Su, Yeong-Chin Chen Japanese journal of applied physics . 2011,第6Issue1期

机译：用于制造非晶硅薄膜晶体管的有机介电钝化层的激光直接图案化
4. Poly-Si Thin-Film Transistors Robust against Hot-Carrier Stress and Application to Liquid Crystal Displays Fabricated by a 450°C Process [C] . Takeo Shiba, Mutsuko Hatano, Mieko Matsumura, International semiconductors conference . 2003

机译：多Si薄膜晶体管牢固地防止热载体应力和应用于450°C工艺制造的液晶显示器
5. Amorphous silicon thin-film transistor active-matrix for reflective cholesteric liquid crystal displays. [D] . Nahm, Jeong-Yeop. 2000

机译：用于反射胆甾型液晶显示器的非晶硅薄膜晶体管有源矩阵。
6. Liquid crystals for organic thin-film transistors [O] . Hiroaki Iino, Takayuki Usui, Jun-ichi Hanna -1

机译：有机薄膜晶体管的液晶
7. Metal-induced unilaterally crystallized polycrystalline silicon thin-film transistor technology for active-matrix organic light-emitting diode displays with reduced susceptibility to cross-talk [O] . Meng, Zhiguo, Kwok, Hoi-Sing, Wong, Man 2002

机译：用于有源矩阵有机发光二极管显示器的金属诱导的单晶结晶多晶硅薄膜晶体管技术，降低了串扰

Direct Patterning of Silicon Nitride Thin Film by Projection Photoablation for Fabricating Thin-Film Transistor Liquid Crystal Displays

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