Synthesis and Characterization of Zinc-Doped Amorphous Carbon Films by Plasma-Assisted Organometallic Chemical Vapor Deposition

Hiroki Akasaka; Koji Inazu; Naoto Ohtake

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Synthesis and Characterization of Zinc-Doped Amorphous Carbon Films by Plasma-Assisted Organometallic Chemical Vapor Deposition

机译：等离子体辅助有机金属化学气相沉积法合成掺锌非晶碳膜及其表征

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Zinc (Zn)-doped hydrogenated amorphous carbon (a-C:H) films have been fabricated from zinc acetylacetonate by organometallic chemical vapor deposition (CVD). Zn concentration was controlled by a heated flow controller. Deposited films were Zn-doped hydrog

机译：掺杂锌（Zn）的氢化非晶碳（a-C：H）膜已通过有机金属化学气相沉积（CVD）由乙酰丙酮锌制成。 Zn浓度由加热的流量控制器控制。沉积膜为锌掺杂水凝胶

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《Japanese journal of applied physics》 |2008年第3issue1期|1694-1698|共5页
作者
Hiroki Akasaka; Koji Inazu; Naoto Ohtake;
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正文语种 eng
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amorphous carbon; organometallic complex; zinc doping; photovoltaic characteristics;

机译：非晶碳有机金属配合物锌掺杂光伏特性;

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2. The chemical structure of carbon nitride films fabricated by pulsed plasma-assisted chemical vapor deposition [J] . Pap GJ, Bertoti I, Szorenyi T, Surface & Coatings Technology . 2004,第0期

机译：脉冲等离子体辅助化学气相沉积法制备氮化碳膜的化学结构
3. Characterization of Amorphous Carbon Nitride Films Formed by Plasma-Enhanced Chemical Vapor Deposition of CN Radicals Using C K-edge X-ray Absorption Fine Structure Spectroscopy [J] . Kazuhiro Kanda, Jun-ya Igaki, Yuri Kato, New Diamond and Frontier Carbon Technology . 2005,第3期

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4. Metrology and Optical Characterization of Plasma Enhanced Chemical Vapor Deposition, (PECVD), low temperature deposited Amorphous Carbon films [C] . F. Ferrieu, C. Chaton, D. Neira, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics . 2007

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5. The effects of plasma-assisted chemical vapor deposition process variables on the properties of amorphous silicon carbide films. [D] . Moskowitz, Illa Lorren. 2001

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6. Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WNxCy Thin Films [O] . Michelle M. Nolan, Alexander J. Touchton, Nathaniel E. Richey, -1

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8. Investigations of Oxidation Protection Systems for Carbon-Carbon Composites Formed by Chemical Vapor Deposition and Plasma-Assisted Chemical Vapor Deposition Techniques. [R] . Don, J., He, J., Wright, M. A. 1991

机译：化学气相沉积和等离子体辅助化学气相沉积技术制备碳 - 碳复合材料氧化保护体系的研究。

Synthesis and Characterization of Zinc-Doped Amorphous Carbon Films by Plasma-Assisted Organometallic Chemical Vapor Deposition

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