lon-Beam-lnduced Luminescence Analysis as Diagnostic Tool for Microstructure Patterning on Diamond by Proton Beam Writing

摘要

An in situ diagnostics technique for proton beam writing (PBW) on chemical vapor deposition (CVD) diamond was newly established by developing a method of monochromatic ion-beam-induced luminescence (IBIL) analysis. As a compact optic system of IBIL analysis, a couple of optics including a monochromator and a photon counting photomultiplier were installed on the microbeam line of a 3 MV single-ended accelerator. Changes in the crystal structure of single-crystal CVD diamond were continuously monitored by observing the decay of IBIL at a wavelength related to them. Two-dimensional microscopy images of IBIL were also clearly visualized as patterns on diamond in the postprocess of PBW with the same experimental setup. The total fluence of the proton microbeam was well linked to the photon count of IBIL for the fabrication of micrometer-sized carbonized layers in the CVD diamond crystal.