Fabrication of multilayer Pb(Zr,Ti)O-3 thin film by sputtering deposition for MEMS actuator applications

摘要

Multimorph structures composed of multiple thin-film piezoelectric layers and electrode layers were realized by sputtering deposition. Cantilevers with four layers of Pb(Zr,Ti)O-3 (PZT) thin film are fabricated and evaluated. The electrical and piezoelectric characteristics of each PZT layer are very similar and are comparable to those of conventional single-layer PZT thin film. The piezoelectric constant d(31) is estimated to be -38.3pm/V from the relationship between tip displacement and applied voltage under the condition of driving four all piezoelectric layers. The generative force is also estimated from the tip displacement. It is confirmed that multimorph cantilevers have larger generative force than those of conventional unimorph and bimorph cantilevers for identical driving voltage. (C) 2015 The Japan Society of Applied Physics