Electromechanical properties of amorphous In-Zn-Sn-O transparent conducting film deposited at various substrate temperatures on polyimide substrate

摘要

The electromechanical properties of the amorphous In-Zn-Sn-O (IZTO) film deposited at various substrate temperatures were investigated by bending, stretching, twisting, and cyclic bending fatigue tests. Amorphous IZTO films were grown on a transparent polyimide substrate using a pulsed DC magnetron sputtering system at different substrate temperatures ranging from room temperature to 200 degrees C. A single oxide alloyed ceramic target (In2O3: 80wt%, ZnO: 10wt %, SnO2: 10wt% composition) was used. The amorphous IZTO film deposited at 150 degrees C exhibited an optimized electrical resistivity of 5.8 x 10(-4) Omega cm, optical transmittance of 87%, and figure of merit of 8.3 x 10(-3) Omega(-1). The outer bending tests showed that the critical bending radius decreased as substrate temperature increased. On the other hand, in the inner bending tests, the critical bending radius increased with an increase in substrate temperature. The differences in the bendability of IZTO films for the outer and inner bending tests could be attributed to the internal residual stress of the films. The uniaxial stretching tests also showed the effects of the internal stress on the mechanical flexibility of the film. The bending and stretching test results demonstrated that the IZTO film had higher bendability and stretchability than the conventional ITO film. The IZTO film could withstand 10,000 bending cycles at a bending radius of 10mm. The effect of the surface roughness on the mechanical durability of all IZTO films was very small due to their very smooth surfaces. (C) 2015 The Japan Society of Applied Physics