Removal of organic template of mesoporous organosilicate thin films using supercritical carbon dioxide fluids

摘要

An organic template of periodic mesoporous organosilicate films was removed using supercritical CO2 fluids that are compressive solvents with a nanopenetration capability. The removal efficiency was evaluated by infrared spectroscopy and refractive index measurements. The removal ratio was dependent on treatment pressure and temperature and improved when the fluid density and/or temperature was high. Because a very high process temperature can deteriorate the organosilicate frame structure, the removal at a low temperature and a high pressure is preferable. The films under supercritical CO2 processing were characterized also in situ ellipsometry. It was found that the removal is a fast process and mostly completes during temperature ramping. (C) 2017 The Japan Society of Applied Physics