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Synthesis of Robust Mesoporous Metal Oxide Films by the Rapid Replication of Structured Organic Templates in Supercritical Carbon Dioxide

机译:通过临界二氧化碳中结构化有机模板的快速复制来合成鲁棒介孔金属氧化膜

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Ordered mesostructured metal oxides are of enormous interest for a variety of device applications including sensor and detection arrays and low dielectric constant layers in microelectronics1.Typically these materials are prepared by co-operative self-assembly of organic structure-directing agents and suitable precursors for the inorganic framework, including silicon and other alkoxides.2,3 In particular, the formation of mesostructured films can be realized through evaporation induced interfacial self-assembly (EISA).In all cooperative assembly approaches, including EISA, the evolution of the mesostructue and the condensation of the inorganic precursor occur simultaneously.Consequently, the formation of the incipient inorganic network impedes the rapid and controlled formation of highly ordered and oriented mesostructures in thick films and monoliths.
机译:订购的思科结构金属氧化物对各种装置应用具有巨大兴趣,包括传感器和检测阵列和微电子1中的低介电常数层。通过有机结构引导剂的合作自组装和合适的前体制备这些材料制备包括硅和其他醇盐的无机框架,特别是,可以通过蒸发诱导的界面自组装(EISA)来实现腹腔结构薄膜的形成。在所有合作装配方法,包括EISA,腹股沟的演变和无机前体的缩合同时发生。初期的无机网络的形成阻碍了厚膜和整料上的高度有序和定向的腹腔的快速和控制的形成。

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