机译:超大功率热等离子体射流的产生及其在非晶硅膜结晶中的应用
Hiroshima Univ, Grad Sch Adv Sci Matter, Dept Semicond Elect & Integrat Sci, Higashihiroshima, Hiroshima 7398530, Japan;
Hiroshima Univ, Grad Sch Adv Sci Matter, Dept Semicond Elect & Integrat Sci, Higashihiroshima, Hiroshima 7398530, Japan;
Hiroshima Univ, Grad Sch Adv Sci Matter, Dept Semicond Elect & Integrat Sci, Higashihiroshima, Hiroshima 7398530, Japan;
Hiroshima Univ, Grad Sch Adv Sci Matter, Dept Semicond Elect & Integrat Sci, Higashihiroshima, Hiroshima 7398530, Japan;
机译:玻璃基板上非晶硅膜的热等离子体喷射结晶中裂纹产生机理和通过缓冲层插入减少裂纹的研究
机译:微热等离子流辐照非晶硅膜引起的超导结晶
机译:使用热等离子体射流结晶非晶硅薄膜
机译:微观等离子射流诱导的非晶硅膜快速固相结晶的研究
机译:氢化非晶硅膜的氢等离子体增强结晶:基本机理和应用
机译:用于大功率极端紫外线应用的热稳定薄膜滤光片
机译:通过光热挠度光谱,应用对氢化非晶硅膜的非均匀弱吸收薄膜的表征