Enhancing the sensitivity of three-axis detectable surface acoustic wave gyroscope by using a floating thin piezoelectric membrane

摘要

A new type of surface acoustic wave (SAW) gyroscope was developed on a floating thin piezoelectric membrane to enhance sensitivity and reliability by removing a bulk noise effect and by importing a higher amplitude of SAW. The developed device constitutes a two-port SAW resonator with a metallic dot array between two interdigital transducers (IDTs), and a one-port SAW delay line. The bulk silicon was completely etched away, leaving only a thin piezoelectric membrane with a thickness of one wavelength. A voltage controlled oscillator (VCO) was connected to a SAW resonator to activate the SAW resonator, while the SAW delay line was connected to the oscilloscope to monitor any variations caused by the Coriolis force. When the device was rotated, a secondary wave was generated, changing the amplitude of the SAW delay line. The highest sensitivity was observed in a device with a full acoustic wavelength thickness of the membrane because most of the acoustic field is confined within an acoustic wavelength thickness from the top surface; moreover, the thin-membrane-based gyroscope eliminates the bulk noise effect flowing along the bulk substrate. The obtained sensitivity and linearity of the SAW gyroscope were similar to 27.5 mu V deg(-1) s(-1) and similar to 4.3%, respectively. Superior directivity was observed. The device surface was vacuum-sealed using poly(dimethylsiloxane) (PDMS) bonding to eliminate environmental interference. A three-axis detectable gyroscope was also implemented by placing three gyrosensors with the same configuration at right angles to each other on a printed circuit board. (C) 2017 The Japan Society of Applied Physics