Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared By Ion-Beam-Assisted Deposition

摘要

Plastic deformation of TiN thin films with (lll) and (200) preferred orientation was determined based on their hardness anisotropy. Hardness was measured by means of the nano-indentation technique. Plastic deformation of TiN films was caused by the indentation on the trigonal diamond tip, and evidence of this phenomenon was provided by cross-sectional scanning electron microscopy (SEM) observation and transmission electron diffraction (TED) analysis.