Automatic defect inspection of patterned thin film transistor-liquid crystal display (TFT-LCD) panels using one-dimensional Fourier reconstruction and wavelet decomposition

摘要

Large-sized flat-panel displays have become increasingly important for use in computer monitors and televisions. This paper has considered the problem of automatic visual inspection of micro-defects including pinholes, scratches and particles in patterned thin film transistor-liquid crystal display (TFT-LCD) panel surfaces. For large-sized TFT-LCD panel inspection, high-resolution line scan is demanded. We propose a global one-dimensional (1-D) Fourier-based image reconstruction scheme that directly works on the 1-D line images instead of the traditional two-dimensional area images. The proposed method fully uses the inherent geometric structure of a TFT-LCD panel. It first eliminates the frequency components that represent the periodic pattern of a TFT-LCD line image in the 1-D Fourier spectrum and then back-transforms the 1-D Fourier-domain image to the 1-D spatial domain image using the inverse Fourier transform. The Fourier reconstruction process can effectively remove the patterned background and distinctly preserve local anomalies in the resulting 1-D image. Wavelet decomposition is further applied to remove uneven illumination in the filtered image so that defects can be easily segmented with simple statistical control limits. Experimental results on a number of micro-defects embedded in TFT-LCD panels show that the proposed method can reliably detect various ill-defined defects without designing and measuring the quantitative features of individual defect types.