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Book Review: Microengineering, Mems, and Interfacing: A Practical Guide by D. Banks

机译:书评:微工程,内存和接口:D。Banks实用指南

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摘要

Micro-Electro-Mechanical Systems (MEMS) devices are finding an increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone who is serious about entering the field must have a realistic knowledge of just what is possible with MEMS technologies, as well as the myriad issues involved in fabrication and device integration.
机译:微机电系统(MEMS)器件正在各种环境中得到越来越广泛的应用,从化学和生物分析到汽车应用中的传感器和执行器。随着这一巨大的增长,随着制造工艺的改进和新应用的尝试,该领域仍在经历着痛苦。任何认真进入该领域的人都必须对MEMS技术的可行性以及在制造和器件集成中涉及的众多问题有切合实际的知识。

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