The Metallic Silicon Phase β-Si-Ⅱ: Influence of Transport Properties on Ductile Regime Processing for MEMS and NEMS Applications

摘要

Ductile Regime Machining of semiconductors (DRM) offers higher quality of the resulting surfaces. To optimize this process, it is required to understand the thermal kinetics of silicon metallization under pressure. Such understanding is not yet possible since the metallic phases of silicon aren't readily amenable to thermal characterization through direct measurements. This being the case, one has to rely on processing indirect measurement data to obtain refined estimates of the thermal transport properties of pressurized Silicon. A feasible measurement of this sort is the electrical resistivity, since its' variation during indentation and consider is often an indicator of the formation of the metallic silicon phase Sill under the indenter. This paper, therefore, describes a procedure by which the average thermal conductivity of the metallic phase of silicon, Si-Ⅱ is extracted from electrical resistivity measurements taken in real time. The procedure is based on teaming a temperature evaluation code to the resistivity measurements thus allowing the extraction of the conductivity as a function of temperature.