Digital Vibration Sensor Constructed with MEMS Technology

摘要

In this paper, a new digital sensor of acceleration is described. The sensor is based on MEMS device and is capable of measuring both static (gravity) and dynamic (vibration) accelerations. Its primary application is the measurement of vibrations in buildings and other constructions. The aim of this project was to design a low-cost, small-weight small-size acceleration sensor that can operate within simple sensor networks.