Analysis of nonlinear model of gas dynamics in a vertical reactor for gas phase epitaxy

摘要

In this paper, we consider a vertical reactor for gas phase epitaxy. Based on the recently obtained results of Pankratov and Bulaeva [2013, Univ. J. Mater. Sci. 1, 180-200], we analyzed the dynamics of gas transport in the reactor with account nonlinearity of dynamics and rotation of keeper of substrate with the substrate. Based on the analysis, we formulated recommendation to optimize regime of rotation to increase homogeneity of properties of epitaxial layer.