Measurement and Decapsulation of IC Molding Resin Using YAG Laser for Failure Analysis

摘要

We are now developing a laser decapsulation technique of IC molding resin for failure analysis. Laser machining shortens decapsulation process time and reduces adverse environment effects compared to conventional etching methods. However, pure laser decapsulation cannot avoid the damage of IC chips. Therefore, it is necessary to leave molding resin on the chip surface. In this paper, the decapsulation experiment results using a YAG laser are described. In addition, to estimate residual molding thickness, the method of measuring laser light-reflection intensity is proposed. The relation between molding thickness and light-reflection intensity was examined by irradiating a low-output processing laser. And the results of measurement and decapsulation experiments using an experimental system are also described.