Fault analysis method and failure analysis device of the device under measurement

摘要

An analyst obtains a fault analysis method and apparatus that realizes a simple, high-precision, and fault point specification in a light-emitting analysis device without requesting a designer.;The coordinates of the light emitting point 7 on the light-emitting image 5 detected by the light emission analysis device 4 are automatically recognized (step S5), and the coordinates are automatically converted to the coordinates on the layout pattern (data) (step S7). The light emitting point 10 is automatically displayed (step S11), the node name on the netlist (data) of the light emitting point is automatically recognized (step S12) from the coordinates on the layout pattern, and is automatically displayed as the light emitting node name LN on the netlist 11 ( In step S13), the light emitting node on the circuit diagram (data) is automatically displayed as the light emitting point 14 on the circuit diagram CF at the light emitting node name LN (step S15).