Development of Inspection Machine that Detect Small Particles Added on Surface with Precise Pattern by Capturing Backwards Scattered Polarized Light

摘要

The paper discusses the development of inspection machine to detect small particle by capturing backwards scattered polarized light. The proposed optical system consists of very low angle (2°) horizontal line laser light with 5 polarized characteristics and angle 150° backwards line CCD Camera to capture P polarized light from particles on wafer or glass and so on. This system is confirmed to apply the real production of wafer or glass.