Anti-vibration control of contactless planar actuator with manipulator

摘要

Abstract. This paper addresses the anti-vibration control produced by manipulator movements of contactless planar actuatornwith manipulator (CPAM). The manipulator on top of the planar actuator has 2-DOF which provides precise linear and rotarynmovement of the end tip of the manipulator. The successful suppression of the vibration will improve the position accuracy ofnthe CPAM. For the purpose of the anti-vibration control design, a platform of 3-DOF contactless planar actuator with 2-DOFnmanipulator has been designed and manufactured. The platform, that mimics the magnetic array of the planar actuator, isnsuspended by 9 voice coils which are distributed into regular array to simulate the topology of the planar actuator and willnbe used for gravity compensation and for manipulator platform control in 3-DOF: vertically and two tilting angles. The othern3-DOF is fixed by the suspension system consisting of 3 stiff rods. Nine inductive sensors are mounted on the base plate tonmeasure the posture of the platform when the manipulator is working. The CPAM model is based on rigid body dynamics andnmovement of the manipulator is taken as a disturbance in the platform control. According to the concept of loop shaping, robustnH∞controllers for each of the DOF of the platform are then designed depending on the estimated disturbance force and torquenfrom the manipulator. Control responses in 3-DOF are then presented. The results illustrate high positioning stability.