This paper addresses a new approach for compensation of nonlinear effects of creep and hysteresis on the piezotube scanners which are used in scanning probe microscopes. Although the significant contribution of nonlinearities, especially hysteresis, originates from noises, researchers did not introduce an effective model for this problem vividly. This paper develops a creep and hysteresis model that is generic, computationally efficient, and mathematically traceable such that it is applicable to random input functions such as undesired voltages, thermal field, eccentricity, and mechanical distortions after a long period of use. A modified Bouc–Wen model was obtained and by an effort-follow treatment, voltage displacement of piezotube was considered. For simultaneous creep and hysteresis modeling, a looseness characteristic was attached to the model. At first, from input voltage, the polarization and axial force were calculated. Then, from this force as an input to hysteresis–creep equations, nonlinearities were modeled. Comparison with experimental results shows that this approach is effective and introduces a new compensation algorithm for rate-independent nonlinearities.
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