Impact of scaling on the soft error sensitivity of bulk, FDSOI and FinFET technologies due to atmospheric radiation

摘要

This paper investigates the impact of terrestrial radiation on soft error (SE) sensitivity along the very large-scale integration (VLSI) roadmap of bulk, FDSOI and finFET nano-scale technologies using the MUSCA SEP3 tool. The terrestrial radiation considered in this work includes neutron, proton, and muon particles and alpha-emitters.