机译:通过微制造技术开发的高精度增量电容角度编码器
Tsinghua Univ Dept Precis Instruments Beijing 100084 Peoples R China;
Tsinghua Univ Dept Precis Instruments Beijing 100084 Peoples R China;
Tsinghua Univ Dept Precis Instruments Beijing 100084 Peoples R China;
Tsinghua Univ Dept Precis Instruments Beijing 100084 Peoples R China;
Tsinghua Univ Dept Precis Instruments Beijing 100084 Peoples R China;
Tsinghua Univ Dept Precis Instruments Beijing 100084 Peoples R China;
Tsinghua Univ Dept Precis Instruments Beijing 100084 Peoples R China;
Electrodes; Fabrication; Capacitance; Temperature measurement; Stators; Silicon; Integrated circuit interconnections; Capacitive angle encoder; microfabrication technology; parasitic parameters optimization; printed circuit board (PCB) technology;
机译:使用宏微双驱动高精度比较器校准非接触式增量线性编码器
机译:具有低温直接晶圆粘合技术的电容式微机械超声换能器的制造
机译:使用CMOS-MEMS技术制造微机械电容开关
机译:广视角IPS模式显示器中的最新开发的内置电容式触摸屏技术
机译:微机械电容式加速度计的设计与制造。
机译:基于电容消除阵列和同步开关解调方法的电容角编码器模拟接口电路
机译:使用CmOs-mEms技术制造微机械电容开关
机译:双电容轴角编码器,带模拟输出信号