Simultaneous Evaluation of Microscopic Defects and Macroscopic 3-D Shape of Planer Object Derived From Specular Reflection Image Sequence

摘要

This paper proposes a precise method of real - izing simultaneous measurement of microscopic defects and the macroscopic three-dimensional shapes of planar objects having specular reflection surfaces. The direction vector field of surface tilt is evaluated directly by the introduction of a moving slit - light technique based on computer graphic animation.