An Ultra-deep High-q Microwave Cavity Resonator Fabricated Using Deep X-ray Lithography

摘要

An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal eleclrofonning to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth side-walls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.