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Improvement of anisotropy sensitivity in the scanning acoustic microscope

机译:扫描声显微镜中各向异性灵敏度的提高

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摘要

The response of the conventional scanning acoustic microscope (SAM) to anisotropic materials is theoretically investigated. For this purpose, the reflection coefficient of plane acoustic waves incident on a liquid-solid interface is numerically calculated for a general anisotropic solid oriented in any arbitrary direction. In general, the reflection coefficient depends on polar and azimuthal angles of incidence. For the case of a circularly symmetric acoustic microscope lens, a mean reflectance function can be defined that depends only on the polar angle. With this mean reflectance function, it is very easy to predict the anisotropic material response of the acoustic microscope. It is found that, under certain conditions, the amplitude response of the acoustic microscope can depend heavily on the orientation of the solid material under investigation. The amplitude of the acoustic microscope signal is influenced by the orientation of the material because there is a cancellation of acoustic rays reflected from the object surface at different azimuthal angles. This cancellation is revealed as a minimum in the mean reflectance function. It is shown by numerical simulation that the sensitivity to orientation can be increased by the use of a ring-shaped insonification at the back of the acoustic lens.
机译:理论上研究了传统扫描声显微镜(SAM)对各向异性材料的响应。为此,对于在任意方向上定向的一般各向异性固体,数值计算入射在液-固界面上的平面声波的反射系数。通常,反射系数取决于入射的极性和方位角。对于圆对称声学显微镜透镜,可以定义仅取决于极角的平均反射率函数。借助这种平均反射功能,可以非常轻松地预测声学显微镜的各向异性材料响应。发现在某些条件下,声学显微镜的幅度响应可能在很大程度上取决于所研究的固体材料的取向。声学显微镜信号的幅度受材料方向的影响,因为从物体表面反射的声射线在不同的方位角上会相互抵消。这种抵消在平均反射率函数中显示为最小值。数值模拟表明,可以通过在声透镜的背面使用环形声波来提高对方向的敏感性。

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