Electroacoustic model for electrostatic ultrasonic transducers withV-grooved backplates

摘要

Capacitive ultrasonic transducers are widely used to generatenairborne ultrasound. This paper presents an equivalent circuit for annelectrostatic transducer with a V-grooved backplate. The comparisonnbetween simulation results and measurements on a prototype transducernshows that the model gives reliable results. This model is useful innmany applications, for example to simulate sensors in a robot and tondesign ultrasonic transducer systems