Measurement of elastic modulus s11D of thinfilm ZnO by resonance method

摘要

The elastic modulus of thin film ZnO has been measured bynattaching a Si-ZnO strip to a ceramic bimorph, deflecting the latternwith an electric signal, and measuring the resonance frequencies of thenSi-ZnO strip. The resonance frequencies of the Si-ZnO strip depend onnthe properties of both Si and ZnO. The properties of Si are known, and,nthus, the elastic modulus of thin film ZnO can be calculated from thenresonance frequency of the beam. The results we obtained are presentednin this report