Propagation characteristics of longitudinal leaky SAW in Al-grating structure

摘要

New orientations for longitudinal leaky SAW with small propagation losses and high velocities in lithium niobate (LN) and lithium tantalate (LT) have been found. Their velocities are 6100 to 6500 m/s in LN and 5200 to 5800 m/s in LT. Their propagation losses are almost negligible only in the case of an Al-grating structure. For example, the Al thickness relative to the SAW wavelength must be 8.4% for 171/spl deg/YZ'-LN; for 133/spl deg/YZ'-LT, the value must be 9.2%. These propagation properties were obtained by using a simulator that combined both finite-element and analytical methods. These results were also well confirmed by measuring the impedance responses of one-port SAW resonators.