New longitudinal leaky SAWs with small propagation losses and high velocities in lithium niobate and lithium tantalate have been found. Their velocities are 6100 to 6500 m/s in lithium niobate and 5200 to 5800 m/s in lithium tantalate. Their propagation losses are almost negligible only in the case of an Al grating structure. For example, the relative Al thickness to the SAW wavelength must be 8.4% for 171/spl deg/YZ'-LN, while for 133/spl deg/YZ'-LT, the value must be within 9.2%. These propagation properties were obtained by using a simulator that combined both finite-element and analytical methods. These results were also well confirmed by measuring the impedance responses of one-port SAW resonators in experiments.
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机译:在铌酸锂和钽酸锂中发现了具有小传播损耗和高速度的新型纵向泄漏声表面波。它们的速度在铌酸锂中为6100至6500 m / s,在钽酸锂中为5200至5800 m / s。仅在Al光栅结构的情况下,它们的传播损耗几乎可以忽略不计。例如,对于171 / spl deg / YZ'-LN,相对于SAW波长的Al相对厚度必须为8.4%,而对于133 / spl deg / YZ'-LT,Al值必须在9.2%以内。这些传播特性是通过使用结合了有限元和分析方法的模拟器获得的。通过在实验中测量单端口SAW谐振器的阻抗响应也很好地证实了这些结果。
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