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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Electromigration in Al thin films induced by surface acoustic waves: application to imaging
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Electromigration in Al thin films induced by surface acoustic waves: application to imaging

机译:表面声波在铝薄膜中的电迁移:在成像中的应用

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摘要

The propagation of a high amplitude surface acoustic wave in an Al thin film induces a large-scale electromigration phenomenon resulting in a permanent etching of the acoustic field in the film. The etched patterns depend on the time of propagation and on the acoustic characteristics. Preliminary observations of a few grooved structures in Al films have been performed by different techniques. A first explanation of this phenomenon based on dynamical Grinfeld instabilities is proposed. By providing permanent pictures of acoustic fields emitted by transducers, this effect could be used to perform imaging of surface acoustic wave propagation.
机译:高振幅表面声波在Al薄膜中的传播会引起大规模的电迁移现象,从而永久性腐蚀薄膜中的声场。蚀刻的图案取决于传播时间和声学特性。通过不同的技术对铝膜中的一些沟槽结构进行了初步观察。提出了基于动态Grinfeld不稳定性的这种现象的第一种解释。通过提供换能器发出的声场的永久图像,此效果可用于执行表面声波传播的成像。

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