Micromachining of a piezocomposite transducer using a copper vaporlaser

摘要

A 1-3 piezocomposite transducer with front face dimensions ofn2×2 mm has been micromachined using a copper vapor laser. Thendevice consists of PZT5A piezoceramic pillars with a 65-Μm pitchnsuspended in a low viscosity thermosetting polymer. The kerf width is 13nΜm, and the transducer thickness is 170 Μm, making the devicensuitable for ultrasonic reception at frequencies close to 10 MHz