Small and low-loss IF SAW filters using zinc oxide film on quartz substrate

摘要

It was previously reported that a Rayleigh wave propagating on a zinc oxide film (ZnO)/ST-cut 35°X propagation quartz substrate structure has the characteristics of an excellent temperature coefficient of frequency (TCF) and a large electromechanical coupling factor k.. This substrate was applied to various intermediate-frequency (IF) stage filters. During the filter development, it was clarified that a spurious response due to the Love wave was generated. In this study, a new quartz substrate has been developed with a specific cut and propagation angle, that has the same values of the TCF an(] the coupling factor as the above-mentioned ones. In addition, it does not have the spurious response due to the Love wave. The combination of this specific-cut-angle quartz and ZnO film has been applied to IF filters for wideband code division multiple access (W-CDMA) and narrow-band CDMA (N-CDMA) systems. The insertion losses of their IF filters were 3-5 dB better and their TCF was superior Δf/f = 0.37 ppm/°C: one-third) compared with the conventional surface acoustic wave (SAW) filters.