Rayleigh and shear horizontal surface acoustic properties of (100) ZnO films on silicon

摘要

(100) ZnO films on silicon will excite Rayleigh SAWs along the z-axis and shear horizontal (SH) SAWs along the y-axis. Rayleigh SAW modes of (100) ZnO films on silicon have smaller film thickness ratios, higher phase velocities, and larger electromechanical coupling coefficient (K2) than the those of (002) ZnO films on silicon. This is special for Rayleigh mode 1, where the K2 curve shows a maximum value of 3.37% at h/;B; = 0.28 and the velocity is 5258 m/s. This is special for SH mode 0, where the K2 curve shows a maximum value of 3.3% at h/;B; = 0.28 and the velocity is 3242 m/s.