Effects of defect propagation/growth on in-line defect-based yieldprediction

摘要

This paper presents the importance of understanding defectnpropagation/growth and its impact on in-line yield prediction. In ordernto improve the prediction accuracy, impact of defect propagation andngrowth phenomena needs to be modeled and incorporated into yieldnprediction system. We developed a new yield prediction model by takingninto account defect carryover. The empirical results of interlayer andnintralayer defect propagation analysis using actual fabline data arenpresented