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Modeling a die bonder with Petri nets: a case study

机译:用Petri网建模芯片键合机:案例研究

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摘要

The process of designing complex manufacturing machines involves problems of interdisciplinary communication, design space exploration as well as design evaluation and analysis that can best be solved by integrating modeling and simulation stages into the development process. Requirements necessary for a modeling environment are: support for hierarchical and modular structuring, module reuse, configurability of the model, executability of the model with a notion of time, and intuitive usability. The CodeSign object-oriented, temporal Petri net formalism with its associated tool is a modeling and simulation environment to meet those requirements. A case study conducted in an industrial setting is described that demonstrates the applicability of the CodeSign approach to the modeling of semiconductor manufacturing equipment with step-wise refinement. Results are given to show the accuracy of simulation results with respect to data actually measured on the machine. The CodeSign simulation results are shown to have superior accuracy compared to the output of a previous spreadsheet model of the same machine.
机译:设计复杂制造机器的过程涉及跨学科交流,设计空间探索以及设计评估和分析的问题,这些问题可以通过将建模和仿真阶段集成到开发过程中来最好地解决。建模环境的必要要求包括:支持分层和模块化结构,模块重用,模型的可配置性,带有时间概念的模型的可执行性以及直观的可用性。 CodeSign面向对象的时间Petri网形式及其相关工具是满足这些要求的建模和仿真环境。描述了在工业环境中进行的案例研究,该案例演示了CodeSign方法在逐步完善的半导体制造设备建模中的适用性。给出的结果显示了相对于机器上实际测量的数据而言,仿真结果的准确性。与同一机器以前的电子表格模型的输出相比,CodeSign仿真结果显示出更高的准确性。

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