A Novel Dynamic Process Control Scheme to Improve Cycle Time in Fabs

摘要

Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.