Guest Editorial Special Section on the 2019 International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH)

摘要

As guest editor for the Special Section on the 2019 International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH), I am gratified to be able to present IEEE Transactions on Semiconductor Manufacturing readers with a selection of papers based on work presented at the 2019 edition of the conference. The CS-MANTECH conference is a unique technical forum for presenting advancements in compound semiconductor devices. A special strength of CS-MANTECH is its strong emphasis on manufacturing technologies associated with compound semiconductor manufacturing. While devices based on compound semiconductors have long been used in high-performance RF, microwave, and millimeter-wave systems, in recent years compound-semiconductors have been increasingly finding their way into power systems (through advancements in SiC, GaN, Ga2O3, and other wide band gap device technologies). In addition, while compound semiconductors have long been essential for optoelectronic applications such as detectors, LEDs, and lasers, the widespread commercialization of these technologies has led to rapid advances in volume manufacturing of these devices. Additionally, trends towards tighter integration with silicon-based technologies to provide enhanced system-level performance and functionality have been accelerating, providing further opportunities for advancements in compound semiconductor manufacturing.