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Analysis of 3-D metallization structures by a full-wave spectral-domain technique

机译:全波谱域技术分析3-D金属化结构

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摘要

A full-wave method for the investigation of microstrip and coplanar structures including 3-D metallization structures is presented. The spectral-domain analysis method is used to calculate the S-parameters of unshielded microwave components containing bond-wires and air-bridges. The general formulation and the implementation procedure of the method are described. The application of the theory is given by a comparison of measured and calculated results for a spiral inductor, including an air-bridge.
机译:提出了一种研究微带和共面结构(包括3-D金属化结构)的全波方法。频谱域分析方法用于计算包含键合线和气桥的非屏蔽微波组件的S参数。描述了该方法的一般公式和实现过程。该理论的应用是通过比较螺旋电感器(包括空气桥)的测量结果和计算结果来给出的。

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