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首页> 外文期刊>Microwave Theory and Techniques, IEEE Transactions on >Microwave Properties of an Inhomogeneous Optically Illuminated Plasma in a Microstrip Gap
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Microwave Properties of an Inhomogeneous Optically Illuminated Plasma in a Microstrip Gap

机译:微带隙中的不均匀光学照明等离子体的微波特性

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The optical illumination of a microstrip gap on a thick semiconductor substrate creates an inhomogeneous electron–hole plasma in the gap region. This allows the study of the propagation mechanism through the plasma region. This paper uses a multilayer plasma model to explain the origin of high losses in such structures. Measured results are shown up to 50 GHz and show good agreement with the simulated multilayer model. The model also allows the estimation of certain key parameters of the plasma, such as carrier density and diffusion length, which are difficult to measure by direct means. The detailed model validation performed here will enable the design of more complex microwave structures based on this architecture. While this paper focuses on monocrystalline silicon as the substrate, the model is easily adaptable to other semiconductor materials such as GaAs.
机译:厚半导体衬底上的微带间隙的光学照明会在间隙区域中产生不均匀的电子空穴等离子体。这允许研究通过等离子体区域的传播机理。本文使用多层等离子体模型来解释此类结构中高损耗的起因。测量结果显示在高达50 GHz的频率下,与模拟的多层模型显示出良好的一致性。该模型还允许估算等离子体的某些关键参数,例如载流子密度和扩散长度,这些参数很难用直接方法测量。此处执行的详细模型验证将使您可以基于该体系结构设计更复杂的微波结构。尽管本文以单晶硅为衬底,但该模型很容易适用于GaAs等其他半导体材料。

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