A Mesh Deformation Technique Based on Solid Mechanics for Parametric Analysis of High-Frequency Devices With 3-D FEM

摘要

In this paper, a versatile technique for mesh deformation is discussed, targeted at the electromagnetic (EM) field simulation of high-frequency devices using the 3-D finite element method (FEM). The approach proposed applies a linear elasticity model to compute the displacements of the internal mesh nodes in 3-D when the structure geometry is changed. The technique is compared with an alternative approach based on harmonic radial basis functions. It is shown that the numerical effort needed to solve the mechanical problem is small compared with the EM simulation. The proposed mesh deformation technique is verified using the examples of a parametric analysis of high-frequency devices with the 3-D FEM method. The numerical tests demonstrate that the proposed method is fast and gives high-quality meshes, even for very large deformations of geometry. We show that the benefit of the application of mesh deformation techniques is the elimination of the remeshing noise that appears in the parametric analysis of high-frequency circuits with mesh-based methods.