Intrinsically Switchable Filter Bank Employing Ferroelectric Barium Strontium Titanate

摘要

An intrinsically switchable and frequency reconfigurable bulk acoustic wave filter bank based on ferroelectric barium strontium titanate (BST) is presented. Ferroelectric BST possesses electric-field-induced piezoelectricity, enabling the design of voltage-controlled acoustic devices, including thin-film bulk acoustic resonators and solidly mounted resonators. In this paper, a triple-band switchable filter bank, consisting of three 2.5-stage filters based on BST FBARs, is designed, simulated, and fabricated for the first time. The bandpass filters have center frequencies at 1.85, 1.96, and 2.04 GHz and are selectively turned on based upon the external dc bias voltage applied to each filter. Turning off all the filters provide an isolation of more than 27 dB between the input and output ports. The presented intrinsically switchable ferroelectric filter bank potentially simplifies future radio frequency front ends by integrating both switching and filtering functionalities onto a single device and reduces the overall circuit area.