Room temperature growth of crystalline Mn-Zn ferrite thin films by laser ablation technique

摘要

A laser ablation technique contained with a shadow mask in Ar atmosphere enables us to obtain crystalline ferrite thin films on glass substrates at room temperature. Investigations on the Ar pressure, P/sub Ar/, and the distance between the shadow mask from the target, L/sub 1/, were carried out. The optimum conditions for forming the spinel structure of Mn-Zn ferrite were P/sub A/r=20 mTorr and L/sub 1/=20 mm, respectively.