Optimization of the Gap Size of Flux Concentrators: Pushing Further on Low Noise Levels and High Sensitivities in Spin-Valve Sensors

摘要

Precision healthcare brings many technological challenges for the development of new tools. Among these, the detection of biomagnetic fields in the pico-Tesla range, at room temperature, requires the state-of-the-art sensors with high signal-to-noise ratio. Also, given that biomedical signals are characterized by their low frequency, minimizing the sensor noise has to be addressed simultaneously with the efforts to increase sensor sensitivity. In this paper, we maximize the spin-valve sensors sensitivity by optimizing the distance between the poles of double-layer magnetic flux concentrators (MFCs). An enhancement of the sensitivity from 1.5%/mT (3.8 mV/mT) to 654%/mT (1765 mV/mT) could be observed for a double-layer architecture when a distance from the recessed steep CoZrNb MFC to the NiFe pole is 100 mu m. The impact on the detectivity was evaluated through noise enabling the detection of magnetic fields of 322 pT/Hz(1/2) at 10 Hz.