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首页> 外文期刊>IEEE transactions on electronics packaging manufacturing >Adaptive fuzzy process control of integrated circuit wire bonding
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Adaptive fuzzy process control of integrated circuit wire bonding

机译:集成电路引线键合的自适应模糊过程控制

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摘要

One step in the assembly of integrated circuits is wire bonding, requiring expert knowledge to optimize critical process characteristics. This paper describes a fuzzy logic controller which sets parameters for the wire bonding process for gold ball wire bonds, specifically controlling bonded ball diameter and shear strength density. While the focus is on control of ball bonds, the method is general and may be applied to other bonding methods with minor modifications. The design of the fuzzy engine and the development of rules based on both operator experience and textual sources are discussed. An adaptation technique is developed to tune the controller's membership functions based on the measured results of the process. The controller has been tested on actual devices in an industrial setting; results show improved process control in terms of consistency and reduced operator adjustment.
机译:集成电路组装的第一步是引线键合,需要专业知识来优化关键的工艺特性。本文介绍了一种模糊逻辑控制器,该控制器为金球线焊的焊线工艺设置参数,特别是控制焊球直径和剪切强度密度。虽然重点是控制球形键合,但该方法是通用的,可以稍加修改即可应用于其他键合方法。讨论了模糊引擎的设计和基于操作员经验和文本来源的规则制定。开发了一种自适应技术,可根据过程的测量结果来调整控制器的隶属函数。该控制器已在工业环境中的实际设备上进行了测试;结果表明,在一致性和减少操作员调整方面改进了过程控制。

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