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机译:广泛压力传感的共振Pirani测量仪的概念设计
Department of Power Mechanical Engineering National Tsing Hua University Hsinchu Taiwan;
Institute of NanoEngineering and MicroSystems National Tsing Hua University Hsinchu Taiwan;
Institute of NanoEngineering and MicroSystems National Tsing Hua University Hsinchu Taiwan;
Institute of NanoEngineering and MicroSystems National Tsing Hua University Hsinchu Taiwan;
Department of Power Mechanical Engineering National Tsing Hua University Hsinchu Taiwan;
Pressure sensors; Q-factor; Resonant frequency; Resistance; Frequency measurement; Pressure measurement;
机译:微型皮拉尼压力计,用于低压测量
机译:研究用于多功能感应的微型皮拉尼仪表
机译:带有多个散热器的皮拉尼真空计的灵敏度提高和可测压力极限扩展的融合机理研究
机译:高压和高磁场中性气体密度测量的电离仪的概念设计研究
机译:用于宽范围高效运行的阻抗控制网络谐振DC-DC转换器。
机译:基于静电梳状驱动和压阻感测侧向谐振器的谐振压力传感器
机译:考虑尺寸效应的MEMS电容隔膜表的压力传感隔膜设计
机译:用于监测低真空的Bakable玻璃皮拉尼量规