Braided Electronics and Sensors Based on Parylene Tubes

摘要

This article reports a method of making flexible and stretchable electronics and sensors by braiding parylene tubes. The post-microelectromechanical systems (MEMS) and post-complementary metal oxide semiconductor (CMOS) compatible fabrication process and tubular structure potentially enable the incorporation of many functionalities to the braided devices. For proof-of-concept purposes, metal piezoresistors were integrated on the parylene tubes in this work. The braided devices were assembled using a traditional three-strand braiding method. The mechanical properties have been characterized by measuring the stretching force as a function of displacement for both single-tube and braided devices. In addition, the piezoresistive sensing capability has been characterized. Finally, respiratory monitoring has been preliminarily demonstrated by attaching a braided device on the chest.