High-coupling efficiency vertical ARROW coupler with large tolerance and short coupling length for three-dimensional optical interconnects

摘要

A compact ARROW-type vertical coupler for three-dimensional optical interconnects was demonstrated. The refractive index and thickness of intermediate cladding were optimally designed to achieve large fabrication tolerance and short coupling length with high coupling efficiency. Very short coupling length of 800 /spl mu/m and high coupling efficiency of 96% were experimentally demonstrated.